Abstract
The aligned carbon microcoils having the straight type overall geometry could be obtained using C2H2/H2 as source gases and SF6 as an incorporated additive gas under the thermal chemical vapor deposition system. Their morphologies and crystal structures were investigated and compared with the randomly grown carbon microcoils having the coil or twist type overall geometry. We could observe the enhancement of the (002) peak in XRD spectra of the aligned carbon microcoils indicating the existence of the more regular structure in the aligned carbon microcoils. The aligned carbon microcoils were formed as a bundle shape, while the randomly grown carbon microcoils were appeared as an individual shape. The systematic growth mode for the developing aspect of the aligned carbon microcoils was proposed.
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