Abstract

The adsorption and decomposition of acetylene on Si(100) and vicinal Si(100)9° have been studied using high resolution electron energy loss spectroscopy and low-energy electron diffraction. Acetylene is predominantly chemisorbed molecularly in the temperature range between 80 and ~ 300 K; a small amount of acetylene is partially dissociated. The molecularly-chemisorbed acetylene is rehybridized, and has the hybridization state near sp3. It is proposed that molecular acetylene is di-σ bonded to adjacent Si atoms of a dimer on Si(100).The thermal decomposition of chemisorbed acetylene, and the (inactive) role played by steps are discussed.

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