Abstract
Surface acoustic wave techniques represent a powerful tool for the study of the elastic properties of thin film layers. Simple arrays of interdigital transducers can be used to measure the velocity, attenuation, and piezoelectric properties of oxide films. Results of such measurements on zinc oxide and silicon dioxide films are given and the values compared to their bulk counterparts. High acoustic quality oxide films can be used effectively to enhance the performance of surface acoustic wave devices. Potential application areas are briefly summarized.
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