Abstract

The 4-probe method for resistivity measurements on semiconductors, though widely used, is subject to various kinds of error which are more serious at the higher resistivities. In this paper the causes of error are elucidated, and the method is shown to be capable of accuracy provided suitable precautions are taken, namely: limiting the electric field at the centre probes to 100 mv mm-1; controlling the ambient temperature; and enclosing the measuring circuit in a separately balanced screen.

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