Abstract
Abstract The behaviour of SF 6 in quartz and alumina tubes of a flow reactor capacitively coupled to a 35 MHz radiofrequency generator has been investigated at pressure of 20 torr, with power levels of 3.5÷5.5 cal cm −3 sec −1 and gas flow rates ranging between 0.1 and 2 1(STP) min −1 . A combination of gaschromatographic, mass spectrometric and infrared spectrophotometric techniques has shown the presence of SO 2 F 2 , SOF 4 , SOF 2 , SiF 4 , F 2 , O 2 together with unreacted SF 6 in the discharge products. A detailed quantitative investigation of the effluent products and of their concentration profiles versus space time and power is presented and a general mechanism for the ablation process of the quartz wall is suggested.
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