Abstract

We have studied the microstructure, electrical properties, and gas sensor characteristics of thin tin dioxide (SnO2) films obtained by RF magnetron sputtering of an oxide target. The synthesized films are composed of crystalline rods with a diameter of 10–60 nm and a length of up to 1000 nm oriented perpendicularly to the substrate plane. This morphology facilitates the access of gas molecules to the side surfaces of crystallites. Use of such SnO2 films in a multisensor microsystem expanded the spectrum of recognized gases.

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