Abstract
AbstractFuture microelectromechanical systems will need environmentally friendly lead‐free piezoelectrics in the form of thin films, like Bi1/2Na1/2TiO3 (BNT); however, its application is limited due to the relatively low depolarization temperature (Td). In this work, not only enhanced piezoelectric properties, but also higher Td, are achieved in (001)‐textured 0.94Bi1/2Na1/2TiO3‐0.06BaTiO3 (BNT‐BT6) thin films on widely used platinized Si wafers with a LaNiO3 buffer layer. The piezoelectric coefficient a33,eff is increased by 65% to 43 pm V−1 in the textured films from 26 pm V−1 in the nontextured counterparts. The texturing also raises the Td to ≈140 °C, about 40 °C higher than that in nontextured films. The increase of Td is attributed to the in‐plane tensile thermal stress and the (001)‐textured structure. The present work provides a guideline to improve piezoelectric properties and the thermal stability of BNT‐based lead‐free piezoelectric thin films.
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