Texture transformations in Ag thin films

Abstract

A thickness-dependent texture transformation during annealing of initially (111) fiber-textured face-centered-cubic metal thin films is phenomenologically well known: sufficiently thin films retain the (111) texture, while sufficiently thick films transform to a (100) fiber texture. This transformation has been explained based on minimization of strain and interface energies, but recent work calls into question the roles of both of these driving forces. A high-throughput experimental method for the study of this texture transformation has been developed and applied to thin silver films with and without Ti adhesion layers. More than 150 individual samples spanning a range of thicknesses and interface conditions were prepared in a single deposition run. The texture evolution of these samples was characterized using X-ray diffraction as a function of time and temperature during annealing. The transformation proceeds despite the fact that the stresses are too low according to the strain/interface energy model. For films with Ti adhesion layers, the transformation kinetics and extent of transformation depend on the film thickness in a surprising way with intermediate thickness films showing initially fast transformations and stable mixed textures, while thicker films show an incubation time but transform fully. The results are consistent with reduction in defect energy (e.g. dislocations or point defects) as the driving force for secondary grain growth in an environment in which only (100) recrystallization nuclei can form. The driving force increases with film thickness so the nonmonotonic variation in transformation rate implies that the density of (100) nuclei decreases with thickness.