Abstract
Because of the directionality of the ion beam, the coating of complex-shaped samples with the IBAD method will result in different growth conditions of the surface film. A study of variations of the ion-beam incidence angle and I/A ratio reveals inhomogeneous film microstructures. Interesting effects of “ion-channelling” on the crystallographic orientation of the film crystallites are shown. Complete biaxial orientations of the films are achieved with a beam incidence of about 45 °. Orientation changes occur as a function of the ion-beam intensity. Complex interactions of surface and/or strain energy minimization and the channelling-orientation effect are believed to be responsible for these findings.
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