Texture Formation of TiN Films Deposited on (011)(100) Single Crystal of Silicon Steel.

Abstract

In order to clarify the texture of TiN diposited onto (011) [100] single crystals of silicon steel, TiN ceramic coating by the HCD method was done on the surface of polished silicon steel samples. Pole figures of the TiN films and related silicon steel samples were measured simultaneously using an SSD auto pole figure apparatus. (111)TiN pole figure of the TiN film showed the dominant texture of (111) [110] orientation, and (100)Si-steel pole figure of the (011) [100] single crystal of silicon steel showed the dominant texture of (011) [100] orientation. The orientation relationship between the TiN films and a single crystal of silicon steel is considered to be (111)TiN//(011)Si-steel, [110]TiN//[100]Si-steel. It should be noted that the dominant texture of TiN with (111) [110] orientation was formed preferentially on the surface of (011) [100] single crystal of silicon steel, and the orientation relationship between the TiN films and a single crystal of silicon steel was very good misfit within several percent.