Texture evolution and electrical properties of oriented PZT thin films

Abstract

The Pb-rich intermetallic phases, Pt5–7Pb and PbO, play an important role in the texture evolution of oriented PZT thin films. Pt5–7Pb is a (111) textured transient intermetallic phase that nucleates PZT [111]texture. PbO is a (001) textured layer compound that nucleates PZT [100] texture. Zr-rich PZT films with a [111]texture have better electrical properties than [100]textured films because of the polarization effect.