Abstract
The texture and microstructure of thin silver films in Ag/Ti bilayer structures have been characterized as a function of vacuum annealing temperature and time with the use of x-ray diffraction and transmission electron microscopy. A strong preexisting (111) texture in Ag films was further improved upon annealing as evidenced by an increased intensity and narrower distribution of the texture along the film normal. A new (200) texture component was generated after 600 °C annealing; it however had a relatively low intensity when compared to the dominant (111) texture. No abnormal grain growth was observed in annealed Ag films. The texture evolution in all films appeared to complete within the first 15 min annealing, while the microstructure continued to change with additional annealing time. The roles of both surface energy and strain energy in the grain growth were evaluated. A model of the grain growth and texture evolution has been proposed to explain these observations.
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