Abstract
The dependence of the columnar structure on the degree of texture was investigated in cobalt films prepared at various evaporation rates. The angle of incidence was 70° and the substrate temperature 200°C. The evaporation rates range from 70 to 11 000 Å min -1. The texture was analysed by means of pole figures and the columnar structure was observed by replica electron microscopy. The results obtained are as follows. (1) With an increase of the degree of texture the gaps between columnar grains increase but the angle of inclination of the columnar grains decreases. (2) In the film with a high degree of texture bundles of columnar grains exist. On the basis of these results, the correlation between the texture and the columnar structure is briefly discussed.
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