Abstract

The popularity of the ultra high voltage electron microscope has resulted in a tendency to use thick specimens. R. Uyeda, Y. Kamiya, H. Hashimoto, and V. E. Cosslett reported the results of experiments and calculations determining to what thickness the electron microscope can observe specimens.Generally, in the case of thick specimens, the resolution in the microscope image depends on chromatic ‘aberration and when the energy distribution of electron beams, after being transmitted through the specimen, is measured, the resolution due to chromatic aberration can be obtained byIn practice, however, resolution depends on the position of the objects (e.g., irregularities such as lattice defects) in the specimen. This may be attributable to phase contrast due to interference phenomena and also attributable to the top-bottom effect pointed out by H. Hashimoto.

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