Abstract
A novel process using embedded X-ray masks that allows the fabrication of 3D terahertz waveguide components is demonstrated. X-rays produced by a laser plasma source are used to expose a chemically amplified resist. To produce structures with the required depth (/spl sim/50 /spl mu/m) a cyclic exposure and development technique is used. A representative waveguide cavity intended for operation at 2.5 THz is realised.
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