Abstract
We have newly developed micro-stereolithography system to realize freeform fabrication of micrometer order 3D metal structures. In this process, the photo-sensitive resin paste mixed with nanometer sized ceramic and metal particles was spread on a glass substrate with 10 μm in layer thickness by using a mechanical knife edge, and two-dimensional images of UV ray were exposed using DMD (Digital Micro-mirror Device) with 2 μm in part accuracy. Through the layer by layer stacking process, micrometer order three-dimensional objects were formed. Dense metal structures could be obtained by dewaxing and successive sintering of the formed objects. In our recent investigation, micro photonic crystals with lattice structures of alumina or pure copper were fabricated in order to control electromagnetic wave propagation in a terahertz (THz) frequency range. The micro photonic crystals with a diamond structure perfectly reflected the THz wave by Bragg diffraction
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