Abstract

A single-shot quadrature phase-shifting interferometry architecture is presented that is applicable to antenna coupled detector technologies. The method is based on orthogonally polarized object and reference beams and on linear and circular polarization sensitive antennas in space-division multiplexing. The technique can be adapted to two-, three-, and four-step and Gabor holography recordings. It is also demonstrated that the space-division multiplexing does not necessarily cause sparse sampling. A sub-THz detector array is presented containing multiple on-chip antennas and FET plasma wave detectors implemented in a 90nm complementary metal-oxide semiconductor technology. As an example, two-step phase-shifting reconstruction results are given at 360GHz.

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