Abstract
Split ring resonator (SRR) structures based terahertz (THz) metamaterials with different gap dimensions are fabricated on polyethylene naphthalate (PEN) films by parallel laser micro-lens array (MLA) lithography and lift-off process. The narrowband resonance is achieved in single layer SRR samples. A series of single layer SRR samples are fabricated with different gap sizes to obtain successive narrowband THz resonances over a wide THz range. For broadband design, these single layer SRR samples are stacked to form a multilayer structure. The multilayer SRR is experimentally demonstrated with a much broader bandwidth of 0.221 THz and enhanced resonance up to 2.14 times as compared to the single layer SRR.
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