Abstract
Terahertz Bessel Beam Applied to Thickness Measurement of Ellipsometry Methods
Highlights
Terahertz (THz) waves are electromagnetic waves with a frequency from 0.1 THz to 10 THz and a wavelength from 30 um to 3 mm, which are between microwaves and infrared waves
This paper introduces a Terahertz (THz) ellipsometer thickness measurement method based on Bessel beams
The THz Bessel beam has the characteristics of self-healing and diffraction-free
Summary
Terahertz (THz) waves are electromagnetic waves with a frequency from 0.1 THz to 10 THz and a wavelength from 30 um to 3 mm, which are between microwaves and infrared waves. The Bessel beam has diffraction-free characteristics, the intensity distribution remains unchanged during propagation and has a high degree of localization [13] [14] [15] It is widely used in precision measurement, laser processing and other fields in the optical waveband. We proposed the application of THz waves to accurately measure the thickness of samples in the order of millimeters and hundreds of microns.
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