Abstract
Monolithic integration of tensile-strained Si/ Germanium (Ge)-channel n-MOS and tensile-strained Ge p-MOS with ultrathin (equivalent oxide thickness ~14 Aring) HfO2 gate dielectric and TaN gate stack on Si substrate is demonstrated. Defect-free Ge layer (279 nm) grown by ultrahigh vacuum chemical-vapor deposition is achieved using a two-step Ge-growth technique coupled with compliant Si/SiGe buffer layers. The epi-Ge layer experiences tensile strain of up to ~0.67% and exhibits a peak hole mobility of 250 cm2/V ldr s which is 100% higher than the universal Si hole mobility. The gate leakage current is two orders of magnitude lower compared to the reported results on Ge bulk.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
