Abstract
The time-dependent modulation of the emission intensities of several Ari and Arii spectral lines was measured with the time-to-amplitude conversion method for an argon discharge at 50 kHz occurring between the electrodes of an asymmetric parallel plate etch reactor. Under the assumptions that the life time of an emitting state is short compared to the electric field period and that the state is populated by electron impact from the ground state, the line intensity becomes proportional to the corresponding excitation rate coefficient. This time-dependent rate coefficient is calculated from the electron energy distribution obtained by solving the quasistationary Boltzmann equation where the plasma electric field is taken to be proportional to the measured electrode potential. Good agreement between the time dependencies of measured and calculated line intensities is achieved for the selected 6d(1/2)01 →4p(1/2)1 transition in Ari if the amplitude of the plasma field is adjusted to 13 V/cm.
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