Abstract

The laser Thomson scattering technique has been applied for measuring the spatiotemporal changes in the electron density (ne) and electron temperature (Te) of a capacity-coupled micro-discharge generated in neon gas at near-atmospheric pressure. A significant difference has been observed in temporal behavior between ne and Te after the discharge generation. The value of ne decreases monotonically from t = 25 ns when the electrical input is truncated. On the other hand, Te is approximately 1.7 eV at 15 ns and, after this point, Te rapidly decreases to about 0.8 eV. Subsequently, Te decreases gradually. These features are discussed on the basis of the recombination processes.

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