Abstract
EUV/SXR induced plasmas can be produced by interaction of intense X-ray or extreme ultraviolet (EUV) radiation beams with gases. Ionization of molecules can result in further dissociation to ionic and neutral species. In this work investigations of the EUV induced plasmas with a relatively high electron density were performed using laser-produced plasma (LPP) EUV or soft X-ray sources. LPPs were produced by irradiation of a double stream gas puff target with xenon as the working gas. EUV or SXR radiation was focused using grazing incidence collectors of different type. EUV irradiation of gases resulted in ionization and excitation of atoms and molecules forming low temperature plasmas. Spatio-temporal behavior of this type of plasmas formed in various gases was investigated using an optical streak camera. Significant differences concerning temporal changes of the optical emission from plasmas created in molecular and atomic gases were revealed. Spectral measurements in a wide range were also performed. The most intense emission lines were assigned to singly charged ions or atoms. Various molecular bands were also detected.
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