Abstract
The batch fabrication of scanning microscopy probes for tip-enhanced Raman spectroscopy (TERS) is an often discussed issue and remains a challenging task. In our work, we started from a known metal moulding process and developed a dry release process based on metal bonding. After establishing the release process, scanning tunnelling microscopy probes could reliably be fabricated and used for tip-enhanced Raman measurements. The Raman signal enhancement with laser excitation from the side was investigated on substrates covered by malachite green dye molecules, where clear signal from few molecules could be detected. TERS sensitivity was investigated on substrates coated with ultra-thin amorphous carbon layers and compared to standard confocal Raman spectroscopy.
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