Abstract

We present a method for the fabrication of ultra-smooth (0.2 nm RMS), aluminum substrates through template stripping (TS). The method relies on the use of mica as a template in combination with thermal evaporation of Al at high (>10 nm/s) rates under vacuum (≤1 × 10-7 Torr). As a reactive metal, Al is usually not considered a viable option for TS off oxide templates. However, under these conditions, the adhesion between the Al film and mica is poor, enabling the removal of the template under water without any mica residue. We verify the absence of mica using atomic force microscopy, X-ray photoelectron spectroscopy, and contact angle measurements. We establish the suitability of these films for surface forces measurements. Multiple-bean interferometry in transmission yields high quality fringes allowing for the measurement of force-distance curves. The adhesion the films to mica is significantly higher than the adhesion of thermally evaporated Al (0.9 nm RMS). Preliminary results suggest that the TS-Al surface displays a higher corrosion resistance. The fabrication method will enable important experiments on this widely used material.

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