Template design and fabrication for low-loss orientation-patterned nonlinear AlGaAs waveguides pumped at 1.55μm

Abstract

Orientation-patterned GaAs templates and AlxGa1−x As waveguides were grown using molecular beam epitaxy technique for nonlinear optical wavelength converters applications and tested by second harmonic generation of 1.56 μm input beam. Current template design leads to waveguide core corrugation, and high transmission loss. An improved template fabrication process is proposed to eliminate template-induced corrugation. Initial growth and processing results show that high-quality template surfaces can be obtained, essential for the waveguide re-growth over the GaAs template.