Abstract
A method to fabricate silicon (Si) inverse opals with diamond structure is introduced. The method is based on the arrangement of silica particles in a template consisting of Si pillars periodically distributed. The profile of the pillars is specially designed to induce the self-organized growth of the particles in a diamond lattice along the (110) direction. Afterwards, the inverse structure is achieved by infiltrating the opal with Si and subsequently removing the silica by chemical means. Different from a former approach based on robotic manipulation, this method allows the fabrication of large samples available for integration in planar photonic devices.
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