Abstract
We report the temperature-tuning of novel microcavity resonators with wide free spectral range /spl Delta//spl lambda//sub fsr/, and high finesse. We have fabricated and demonstrated AlGaAs/GaAs ring and disk resonators with diameters of 10.5 and 20.5 /spl mu/m evanescently coupled to single-mode waveguides. Strong lateral waveguide confinement allows micron-size cavities with negligible bending loss and the resonators can be fabricated with reasonably low loss using nanofabrication techniques, resulting in a high finesse. The 10.5-/spl mu/m-diameter disk resonator yields a finesse as high as 120 (Q=8600) and /spl Delta//spl lambda//sub fsr/ of 21.6 nm. The temperature tuning is 1.3 nm/10/spl deg/C, suitable for a thermally-controlled switch or widely tunable filter.
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