Abstract
Amorphous TeO2 thin film, sputtered in the O2+Ar(25%+75%) gas environment using a metallic tellurium target, has been identified as an attractive negative temperature coefficient of delay (TCD) material that can yield a temperature stable device when combined with a surface acoustic wave (SAW) device based on positive TCD material such as LiNbO3. The influence of amorphous TeO2 over-layer on the SAW propagation characteristics (velocity and temperature coefficient of delay) of the SAW filters (36 and 70 MHz) based on 128° rotated Y-cut X-propagating lithium niobate (128° Y-XLiNbO3) single crystal has been studied. It is found that 0.042λ thick TeO2 over-layer on a prefabricated SAW device operating at 36 MHz centre frequency, reduces the TCD of the device from 76ppm°C−1 to almost zero (∼1.4ppm°C−1) without deteriorating its efficiency and could be considered as a suitable alternative for temperature stable devices in comparison to conventional SiO2 over-layer.
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