Temperature sensitivity of Ge–B–SiO_2 waveguide Bragg gratings on a crystallized glass substrate

Abstract

Waveguide Bragg gratings were fabricated by plasma-enhanced chemical-vapor deposition followed by irradiation with KrF excimer laser light through a phase mask. The period of the Bragg grating was 0.53 mum, and the Bragg wavelength was ~1.53 mum . The temperature dependence of the Bragg wavelength was 11 pm/ degrees C for a 10GeO(2) -90SiO(2)(mol.%) core waveguide on a Si substrate, and the Bragg wavelength shift was successfully reduced to 5.0pm/ degrees C by use of a 14GeO(2)-12B(2)O(3)-74SiO(2) (mol.%) core and a crystallized glass substrate with a thermal-expansion coefficient of -2.0x10(-6)(/ degrees C) .