Abstract
A high performance multiplexed fiber-optic sensor consisted of diaphragm-based extrinsic Fabry–Perot interferometer (DEFPI) and fiber Bragg grating (FBG) is proposed. The novel structure DEFPI fabricated with laser heating fusion technique possesses high sensitivity with 5.35nm/kPa (36.89nm/psi) and exhibits ultra-low temperature dependence with 0.015nm/°C. But the ultra-low temperature dependence still results in small pressure measurement error of the DEFPI (0.0028kPa/°C). The designed stainless epoxy-free packaging structure guarantees the FBG to be only sensitive to temperature. The temperature information is created to calibrate the DEFPI's pressure measurement error induced by the temperature dependence, realizing effectively temperature self-compensation of the multiplexed sensor. The sensitivity of the FBG is 10.5pm/°C. In addition, the multiplexed sensor is also very easy to realize the pressure and the temperature high-precise high-sensitive simultaneous measurement at single point in many harsh environmental areas.
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