Abstract
This article reports a two-dimensional, finite-difference heat transfer model for calculating the transient temperature distribution in a polycrystalline silicon cantilever during and after irradiation by a Nd:YAG laser. Results include the peak surface temperature after irradiation and the uniform temperature increase in the microcantilever following subsequent heat conduction through the thickness. The calculations reveal that the time scale after which the temperature is uniform through the thickness is on the order of hundreds of nanoseconds and that the microcantilever cools in the order of tens of milliseconds. The effects of energy transfer to the environment by convection and radiation on the cooling time are also investigated. The accuracy of the model predictions are shown through high-speed temperature measurements using a novel MEMS temperature sensor.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
