Abstract
Iron has been implanted with carbon ions at different temperatures. The implanted specimens have been characterized by X-ray photoelectron spectroscopy and Auger electron spectroscopy. The chemical state of carbon, oxygen and iron was identified by deconvolution of the measured spectra. There were observed double-peak structures for C 1s, O 1s and Fe 2 p 3 2 identified as contributions from carbide and graphite-like species, oxide and hydroxyl groups, and iron carbide and iron oxide respectively. Auger analysis confirms the non-gaussian distribution of the implanted carbon and a remarkable concentration of carbon in the near-surface region. The influence of temperature on the chemical state of implanted iron and on the concentration distribution is discussed.
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