Abstract
Fiber optic Fabry-Perot Interferometer benefits many requirements in pressure sensing. The variation of pressure sensitivity of the polymer-diaphragm-based Fabry-Perot pressure sensor with temperature is studied by investigating the thermal effect of the cavity air and the diaphragm separately. FP cavity vacuum treatment and multi-curvature diaphragm simulation and experimental studies are conducted. Experimental results show that the sensor pressure sensitivity decreases with increasing temperature by 0.46nm/(kPa·°C). The diaphragm’s thermal effect is the leading cause of temperature-induced inconsistency in pressure sensitivity, accounting for 0.43nm/(kPa·°C).
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