Abstract

Temperature, gas and humidity resistive/capacitive sensors on plastic substrates, suitable for mobile applications, like smart RFID tags, have been produced and investigated. The sensor concept is providing simple, versatile and low power solutions for temperature, humidity and gas detection. The device structure was devised together with the data evaluation strategies based on the latest generation ΣΔ analog (resistance and capacitance) to digital converters. The possibility of developing gas sensors on humidity sensitive substrates, having temperature corrected responses is demonstrated. The proposed sensor is aimed to evolve towards “flexible and full plastic” implementations.

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