Abstract
In this article the influence of internal thermal sources of line position detection microscope onto scale error calibration accuracy is analyzed. Short description of the microscope temperature fields and thermal body deformation modelling methodology is proposed, evaluating internal heat sources of microscope. The modelling results graphs showing the influence heat sources onto microscope temperature field. The resulting temperature deformations are given. Draw conclusions about the processes in question affect the scale calibration accuracy. http://dx.doi.org/10.5755/j01.mech.17.3.503
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