Abstract
To deduce the location of absorptive inclusions in thin films, temperature distributions in pure TiO(2) films and TiO(2) films with high-absorptance inclusions are analyzed based on temperature field theory. According to our theoretic simulations, the surface temperature rise increases when absorptive inclusions are incorporated into thin films and shows different values for different inclusions. With the increase of inclusion thickness, the surface temperature rise varies and has a maximum value. A potential method is presented to deduce the location of absorptive inclusion through calculating the surface temperature rise at two modulated frequencies, if it is possible to know in advance the inclusion material or to prejudge this from a thin-film deposition process.
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