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Abstract
Abstract The temperature dependence Y∗(T) of ion-bombardment-induced photon emission from sputtered species of a polycrystalline copper target is measured under conditions in which there is a pronounced increase of the sputtering yield Y at elevated temperatures. The dependence Y∗(T) has been found to be qualitatively different for the optical lines of the neutral and ionized sputtered atoms. The dependences Y∗(T) for the CuI lines are similar to the dependence Y(T), whereas the CuII line intensity is practically independent of the target temperature. The dependences of the photon emission for the CuI and CuII lines on ion incidence angle have also been found to be very different. The results obtained are discussed in terms of existing models for atomic excitation in sputtering.
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