Abstract
Understanding the electron irradiation effects, especially the heating effect, is very important to the in-situ TEM experiments. A model is established to describe the temperature distribution of FIB prepared wedge-shaped specimen induced by electron irradiation, and a Cu2Se specimen is presented to estimate the temperature distribution inside the observed area under different dose rates in an in-situ TEM heating experiments. The result indicates that in normal situations, the electron irradiation caused temperature inhomogeneity inside the observed area is ignorable.
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