Abstract
The deuterium retention in aluminum and molybdenum films co-deposited in magnetron discharge has been measured in a wide range of substrate temperatures (from RT to 800 K) by means of thermal desorption spectroscopy. A multi-step temperature dependence was observed, which was compared with the diffusion based model and previous experimental data for tungsten films. The key role of lattice defects in deuterium trapping was demonstrated. The highest D retention among the investigated materials was observed in W films, which have the lowest H solubility, but the highest binding energies of hydrogen with defects. The detrapping energies and concentrations of defects in the films were estimated on the base of the model, and the energies are consistent with the data for bulk materials.
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