Temperature Dependence of Critical Thickness for Two Dimensional Growth of GexSi1−x on Si Substrate

Abstract

ABSTRACTFor obtaining good structural perfection, the molecular beam epitaxial (MBE) growth of GexSi1−x on Si substrate should not only be kept in the pseudomorphic form but also in layer-by-layer growth stage. We found that the two dimensional layer-by-layer growth of GexSi1−x on Si could persist to a certain deposition thickness, beyond that the transition to islanding growth occurs. The transition thickness is significantly dependent on the growth temperature and germanium content, and is always smaller than the critical thickness of pseudomorphic growth. In order to obtain good crystalline quality in growing GexSi1−x superlattices on Si substrates, the thickness of GexSi1−x layers should be controlled below the transition thickness and lower growth temperature is favorable.