Abstract
Nonmagnetic electrical heating and temperature sensing chip fabricated on quartz substrate is developed, and a high-precision digital temperature control system is designed based on this chip. The heating resistance and temperature sensing resistance are prepared by depositing two layers of Ti/Pt alloy electrodes on quartz substrate through magnetic field cancellation design. The temperature coefficient of fabricated Ti/Pt temperature sensing resistance is +0.197%/℃. The simulation results show that the residual magnetic field generated by the heating current in the atomic gas chamber closely adjacent to the chip is less than 0.1 nT. Temperature control in the range of 100~150 ℃ is realized, and the temperature stability is about 0.02 ℃. Due to the high light transmittance of quartz glass, this heating chip has significant advantages for optical integration and miniaturization of atomic magnetometers.
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