Abstract
Measuring strain without parasitic thermal influence is vital. A temperature compensated strain sensor is fabricated in fused silica using femtosecond laser micromachining. Utilizing femtosecond laser direct writing and femtosecond irradiation followed by chemical etching, two Bragg gratings are fabricated in the bulk of a fused silica substrate. By suspending one of the Bragg gratings in a cantilever, it is mechanically isolated from the rest of the substrate. Thermal and tensile characterization showed that both Bragg gratings are sensitive to thermal changes with a sensitivity around 10.5 pm/°C, while only the non-isolated Brag grating is sensitive to strain with a sensitivity of 1.1 pm/µ<i>ϵ</i>. Hence, it is proven that the parasitic thermal influence on the strain sensor can be compensated by taking into account the response of the isolated Bragg grating.
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