Abstract
The temperature coefficient of frequency (TCF) for surface acoustic waves (SAW) propagating on (0001) bulk AlN single crystal has been measured at 358 MHz in the temperature range 25–70°C. The TCF value −19 ppm/° is in agreement with the value estimated from the temperature coefficients of the AlN elastic constants. This value is considerably smaller than temperature coefficients of many materials currently used for SAW substrates.
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