Abstract
A quarter wavelength superconducting aluminum film coplanar waveguide resonator with a high-quality factor was designed and fabricated. Furthermore, its resonant frequency and quality as a function of temperatures and exciting powers were investigated. The experimental results showed that the resonance frequency decreases about 1% with the increase of temperature from 50 mk to 1 K, and the load quality factor of the resonator also decreases. The resonant frequency decreases with power from − 120 to − 70 dBm. The quality factor increases with increased excitation power due to the loss decreases and nonlinearity. The results are consistent with the theoretical analysis of the surface impedance model.
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