Abstract
This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the “bi-metallic” effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a polyimide parallel plate capacitive structure with the microporous array on the upper electrode designed for high sensitivity and fast response. Numerical analysis and COMSOL simulation showed that the temperature detection sensitivity is 0.2 mV/°C in the range of 193–393 K and humidity sensitivity is 0.405 pF/% relative humidity (RH) with the response time of 34 s in the humidity range of 0%–100% RH. The integrated temperature and humidity sensor has the advantages of small dimension, wide detection range, high precision, and fast response.
Highlights
Detection of temperature and humidity is of great significance in intelligent systems and industrial applications.1–3 individual detection of temperature and humidity often results in large dimension, high power consumption, and high cost
It can be seen that the capacitance changes very little while increasing and decreasing the relative humidity, which ensures the stability of the humidity measurement
This paper presents the design and simulation of a monolithically temperature and humidity sensor based on microelectromechanical systems (MEMS) technology
Summary
Detection of temperature and humidity is of great significance in intelligent systems and industrial applications. individual detection of temperature and humidity often results in large dimension, high power consumption, and high cost. The MEMS temperature and humidity integrated sensor has caused extensive concern because of its high sensitivity, wide temperature detection range, fast response, good robustness, small dimension, and mass production. The multi-layer cantilever temperature sensor is based on different thermal expansion coefficients of materials and has advantages of high sensitivity, low power consumption, fast response, and wide working range. The parallel plate capacitive humidity sensor has high sensitivity and wide range, but the response is slow due to the small contact area of humidity sensitive material with water molecules. The numerical analysis and COMSOL simulation software were employed to evaluate the detection sensitivity and response time of the designed integrated temperature and humidity sensor, and the parameters were optimized to provide a guideline for the device exploration
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