Abstract
Liquid-phase bonded aluminum–silicon/aluminum nitride interface structure was investigated using high-resolution transmission electron microscopy. A textured layer of aluminum formed a stable orientation relationship with aluminum nitride, which showed Al(111) to be tilted by about 4° with respect to the AlN(0001) interface plane. The unique orientation relationship between Al and AlN was predicted as one of the stable orientation relationships using coincidence of reciprocal lattice point method, which surveys the degree of geometrical coherency between two crystals in three-dimensional space. A stable orientation relationship was found to be (001)[1\( \bar{1} \)0]Al//(2\( \bar{2} \)03)[11\( \bar{2} \)0]AlN.
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