Abstract
The effect of damage on microstructure of multilayer coatings (TiN/Ti/a-C:H) have been analyzed. They were deposited through Pulsed Laser Deposition technique (PLD). The coatings microstructure was characterized using TECNAI F20 (200kV) FEG. The phase and chemical composition were described by EDS (Energy Dispersive X-Ray Spectroscopy) and electron diffraction patterns respectively. Coatings damage resistance was tested by pushing diamond ball with 1N of the applied load (static test). Thin foils were prepared directly from the wear track by focused ion beam method (FIB) using QUANTA 200 3D DualBeam. The multilayer coatings were characterized by strongly dislocated microstructure in TiN layers (like in single layered TiN), while a-C:H were amorphous. After mechanical test the multilayer TiN/Ti/a-C:H coating was strongly deformed. Ceramic TiN and a-C:H layers showed brittle cracking, while very thin metallic Ti layers (presented at each interface) deformed plastically. Deformation lines were propagating in 450 to crystalline growth direction. The wear of crystalline TiN layers caused cracks along {111} planes. The presence of metallic phase lead to the cracking resistance properties increase and the increase an energetic cost of propagating cracks.
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