TEM Analysis of Deformation Zones in FIB-Prepared Samples of Microploughed Gold (100) and (111) Surfaces

Abstract

To improve the understanding of the mechanical deformation mechanisms associated with friction, wear, and precision machining processes, a detailed set of microploughing experiments were performed on gold single crystal surfaces. Large single crystals that had an edge length of 1.5 mm and a thickness of 1 mm were used for this work. Since the microplough depths ranged from 100 nm to 1600 nm, it was important that the material be damage free at the surface. This condition was verified by alpha particle backscattering. A stand-alone STM head, having a singlecrystal diamond tip, was used in conjunction with a Digital Instruments Nanoscope Ilia controller to generate the 13 μm long microploughs. The vertical ploughing force was measured using a Mettler AE130 semi-microbalance.After generating the microploughs and measuring their geometry with an AFM, some of the microploughs were cross sectioned for TEM observation.