Abstract
Excavate and compare the technical themes of IC manufacturing industry chain of domestic and foreign patents, so as to objectively and comprehensively reveal the technical themes and differences of IC manufacturing in domestic and foreign, hoping to provide valuable reference for domestic IC manufacturing. Based on the integrated circuit manufacturing process, established the patent retrieval formula of each process and retrieved the patent data. Through TF-IDF algorithm and LDA model to mine the technical topics of domestic and foreign patents on the basis of self-built thesaurus and stop-words list, and summarized mining results. Through the analysis of results, it is found that the technical topics of integrated circuit manufacturing in domestic and foreign have similarities and differences, and the upper concept is strong, but the technical topics are more detailed of foreign patents.
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